The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2015
Filed:
Nov. 30, 2012
Applicant:
Solar-semi Gmbh, Radolfzell, DE;
Inventor:
Pirmin Muffler, Orsingen-Nenzingen, DE;
Assignee:
solar-semi GmbH, Radolfzell, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23B 31/30 (2006.01); B25B 11/00 (2006.01); H01L 21/67 (2006.01); B44C 1/22 (2006.01); H01L 21/683 (2006.01);
U.S. Cl.
CPC ...
B44C 1/227 (2013.01); B23B 31/307 (2013.01); B25B 11/005 (2013.01); H01L 21/67259 (2013.01); H01L 21/6838 (2013.01); Y10S 414/141 (2013.01);
Abstract
In a device for machining, in particular etching and/or developing, substrates, in particular wafers, in particular etching and/or developing, having a turntable, the turntable has a Venturi gap.