The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 14, 2015
Filed:
Aug. 23, 2012
Yuusaku Yoshida, Musashino, JP;
Takashi Yoshida, Musashino, JP;
Hiroshi Suzuki, Musashino, JP;
Shuhei Yoshita, Musashino, JP;
Hisashi Terashita, Musashino, JP;
Yuusaku Yoshida, Musashino, JP;
Takashi Yoshida, Musashino, JP;
Hiroshi Suzuki, Musashino, JP;
Shuhei Yoshita, Musashino, JP;
Hisashi Terashita, Musashino, JP;
Yokogawa Electric Corporation, Tokyo, JP;
Abstract
A resonant pressure sensor including one or more resonant-type strain gauges arranged on a diaphragm may include a sensor substrate made of silicon and including one surface on which one or more resonant-type strain gauge elements are arranged and the other surface which is polished to have a thickness corresponding to the diaphragm, a base substrate made of silicon and including one surface directly bonded with the other surface of the sensor substrate, a concave portion formed in a portion of the base substrate bonding with the sensor substrate, substantially forming the diaphragm in the sensor substrate, and including a predetermined gap that does not restrict a movable range of the diaphragm due to foreign substances and suppresses vibration of the diaphragm excited by vibration of the resonant-type strain gauge elements, one or more conducting holes, and a fluid.