The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2015
Filed:
Mar. 12, 2013
Kawasaki Robotics (Usa), Inc., Wixom, MI (US);
Thomas Miu, Fremont, CA (US);
Shinya Kitano, San Jose, CA (US);
Simon Jeyapalan, Sunnyvale, CA (US);
Ming Zeng, San Jose, CA (US);
Avish A. Bharwani, Santa Clara, CA (US);
Kawasaki Robotics (USA) Inc., Wixom, MI (US);
Abstract
The present disclosure is directed to methods and systems for evaluating wafer size handling capabilities of wafer handling robots and wafer stations in a wafer processing environment. In one embodiment, a method is provided in which size parameters for each of one or more wafer stations and one or more robot hands of a wafer handling robot are set based on user input. A user command identifying a desired robot hand and a desired wafer station is received. A first size parameter of the desired robot hand is compared to a second size parameter of the desired wafer station. If the first size parameter is equal to the second size parameter, or if the second size parameter is an all-size parameter, the user command is executed. If the first size parameter is not equal to the second size parameter, an error is generated.