The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2015
Filed:
Jun. 22, 2012
Alfons Dehe, Reutlingen, DE;
Matthias Herrmann, Munich, DE;
Ulrich Krumbein, Rosenheim, DE;
Stefan Barzen, Munich, DE;
Wolfgang Klein, Zorneding, DE;
Wolfgang Friza, Villach, AT;
Martin Wurzer, Munich, DE;
Alfons Dehe, Reutlingen, DE;
Matthias Herrmann, Munich, DE;
Ulrich Krumbein, Rosenheim, DE;
Stefan Barzen, Munich, DE;
Wolfgang Klein, Zorneding, DE;
Wolfgang Friza, Villach, AT;
Martin Wurzer, Munich, DE;
Infineon Technologies AG, Neubiberg, DE;
Abstract
A MEMS structure includes a backplate, a membrane, and an adjustable ventilation opening configured to reduce a pressure difference between a first space contacting the membrane and a second space contacting an opposite side of the membrane. The adjustable ventilation opening is passively actuated as a function of the pressure difference between the first space and the second space.