The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2015
Filed:
Jul. 23, 2012
Applicants:
Michinobu Mizumura, Yokohama, JP;
Makoto Hatanaka, Yokohama, JP;
Inventors:
Michinobu Mizumura, Yokohama, JP;
Makoto Hatanaka, Yokohama, JP;
Assignee:
V Technology Co., Ltd., Yokohama-shi, Kanagawa, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/10 (2006.01); G03F 7/20 (2006.01); G02B 27/09 (2006.01); G02B 7/00 (2006.01); G02B 3/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7015 (2013.01); G02B 27/0961 (2013.01); G02B 7/00 (2013.01); G02B 3/00 (2013.01); G02B 3/0056 (2013.01); G02B 3/0062 (2013.01); G02B 3/0075 (2013.01); G03F 7/70275 (2013.01);
Abstract
In this microlens array, unitary microlens arrays are respectively stacked onto an upper surface and lower surface of a glass plate, and each of the unitary microlens arrays is supported by an upper plate and a lower plate. Marks for alignment are formed on each of the unitary microlens arrays and on the glass plate, and the unitary microlens arrays and the glass plate are stacked onto each other aligned by these marks. This makes it possible to prevent ununiform exposure in scanning exposure using a plurality of microlens arrays.