The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2015
Filed:
Oct. 10, 2012
Applicant:
Qualcomm Mems Technologies, Inc., San Diego, CA (US);
Inventors:
Clarence Chui, San Jose, CA (US);
William Cummings, Hsinchu, TW;
Brian James Gally, Los Gatos, CA (US);
Lior Kogut, Haifa, IL;
Ming-Hau Tung, San Francisco, CA (US);
Yeh-Jiun Tung, Sunnyvale, CA (US);
Chih-Wei Chiang, Hsin-Chu, TW;
Denis Endisch, Cupertino, CA (US);
Assignee:
QUALCOMM MEMS Technologies, Inc., San Diego, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/00 (2006.01); G02F 1/29 (2006.01); G02B 26/02 (2006.01); B81B 3/00 (2006.01); G02B 26/08 (2006.01); G09G 3/36 (2006.01); G02F 1/1335 (2006.01); G02F 1/01 (2006.01); G09G 3/34 (2006.01);
U.S. Cl.
CPC ...
G02B 26/001 (2013.01); G02B 26/08 (2013.01); G09G 3/3696 (2013.01); G02F 1/29 (2013.01); G02F 1/133621 (2013.01); G02F 1/0128 (2013.01); G02B 26/023 (2013.01); G02F 1/01 (2013.01); G09G 3/3466 (2013.01); B81B 3/0051 (2013.01); B81B 2201/047 (2013.01);
Abstract
A microelectromechanical (MEMS) device includes a substrate, a movable element over the substrate, and an actuation electrode above the movable element. The movable element includes a deformable layer and a reflective element. The deformable layer is spaced from the reflective element.