The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2015

Filed:

Jun. 25, 2013
Applicants:

Yoshiaki Tanaka, Nara, JP;

Takakiyo Harigai, Osaka, JP;

Hideaki Adachi, Osaka, JP;

Eiji Fujii, Osaka, JP;

Inventors:

Yoshiaki Tanaka, Nara, JP;

Takakiyo Harigai, Osaka, JP;

Hideaki Adachi, Osaka, JP;

Eiji Fujii, Osaka, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/18 (2006.01); H02N 2/18 (2006.01); B41J 2/045 (2006.01); B41J 2/055 (2006.01); C04B 35/462 (2006.01); G01C 19/5628 (2012.01); H01L 41/09 (2006.01); H01L 41/113 (2006.01); H01L 41/187 (2006.01); H01L 41/316 (2013.01); B41J 2/14 (2006.01); C23C 14/08 (2006.01); G01C 19/56 (2012.01); G01C 19/5607 (2012.01); C23C 14/34 (2006.01); C30B 23/02 (2006.01); C30B 29/22 (2006.01); B32B 18/00 (2006.01); C04B 35/468 (2006.01); C04B 35/475 (2006.01); C04B 35/50 (2006.01);
U.S. Cl.
CPC ...
H02N 2/18 (2013.01); B41J 2/045 (2013.01); B41J 2/055 (2013.01); C04B 35/462 (2013.01); G01C 19/5628 (2013.01); H01L 41/0973 (2013.01); H01L 41/113 (2013.01); H01L 41/1132 (2013.01); H01L 41/1871 (2013.01); H01L 41/1873 (2013.01); H01L 41/1878 (2013.01); H01L 41/316 (2013.01); B41J 2/14233 (2013.01); C23C 14/08 (2013.01); G01C 19/56 (2013.01); G01C 19/5607 (2013.01); H02N 2/186 (2013.01); C23C 14/3414 (2013.01); C30B 23/02 (2013.01); C30B 29/22 (2013.01); B32B 18/00 (2013.01); C04B 35/468 (2013.01); C04B 35/475 (2013.01); C04B 35/50 (2013.01); C04B 2235/3201 (2013.01); C04B 2235/3215 (2013.01); C04B 2235/3227 (2013.01); C04B 2235/3262 (2013.01); C04B 2235/3272 (2013.01); C04B 2235/3279 (2013.01); C04B 2235/3281 (2013.01); C04B 2235/3298 (2013.01); C04B 2235/787 (2013.01);
Abstract

The present invention provides a non-lead piezoelectric film having high crystalline orientation, the low dielectric loss, the high polarization-disappear temperature, the high piezoelectric constant, and the high linearity between an applied electric field and an amount of displacement. The present invention is a piezoelectric film comprising: a NaLaNiOlayer having only an (001) orientation and a (1-α) (Bi, Na, Ba) TiO-αBiQOlayer having only an (001) orientation. The (1-α) (Bi, Na, Ba) TiO-αBiQOlayer is formed on the NaLaNiOlayer. The character of Q represents Fe, Co, ZnTi, or MgTiThe character of x represents a value of not less than 0.01 and not more than 0.05. The character of y represents a value of not less than 0.05 and not more than 0.20. The character of α represents a value of not less than 0.20 and not more than 0.50.


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