The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2015

Filed:

Nov. 22, 2011
Applicants:

Heewon Jeong, Tokyo, JP;

Masahide Hayashi, Mito, JP;

Kiyoko Yamanaka, Tachikawa, JP;

Inventors:

Heewon Jeong, Tokyo, JP;

Masahide Hayashi, Mito, JP;

Kiyoko Yamanaka, Tachikawa, JP;

Assignee:

Hitachi Automotive Systems, Ltd., Hitachinaka-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/84 (2006.01); B81B 3/00 (2006.01); G01C 19/574 (2012.01); G01P 15/125 (2006.01); G01P 15/18 (2013.01);
U.S. Cl.
CPC ...
B81B 3/0018 (2013.01); G01C 19/574 (2013.01); G01P 15/125 (2013.01); G01P 15/18 (2013.01);
Abstract

To provide a combined sensor that can detect a plurality of physical quantities. With the combined sensor, it is possible to realize, while maintaining performance, a reduction in size and a reduction in costs by increasing elements that can be shared among respective sensors. A weight Mand a detection electrode DTEused in an angular-velocity detecting section are also used as a reference capacitive element of a Z-direction-acceleration detecting section configured to detect acceleration in a Z direction. That is, in the Z-direction-acceleration detecting section, a detection capacitive element including the weight Mand the detection electrode DTEconfiguring the angular-velocity detecting section is used as a reference capacitive element for a detection capacitive element formed by a detection electrode DTEand a weight M


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