The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2015
Filed:
Jun. 25, 2014
Applicants:
Raphael Tsu, Huntersville, NC (US);
Wattaka Sitapura, Charlotte, NC (US);
John Hudak, Charlotte, NC (US);
Inventors:
Raphael Tsu, Huntersville, NC (US);
Wattaka Sitapura, Charlotte, NC (US);
John Hudak, Charlotte, NC (US);
Assignee:
The University of North Carolina at Charlotte, Charlotte, NC (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/12 (2006.01); H01L 29/47 (2006.01); H01L 29/24 (2006.01); H01L 21/02 (2006.01); H01L 21/28 (2006.01); H01L 29/51 (2006.01); C23C 14/08 (2006.01); C23C 14/24 (2006.01); C30B 23/02 (2006.01); C30B 29/16 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 29/47 (2013.01); H01L 29/24 (2013.01); H01L 21/02565 (2013.01); H01L 21/02192 (2013.01); H01L 21/02269 (2013.01); H01L 21/02293 (2013.01); H01L 21/28008 (2013.01); H01L 21/28185 (2013.01); H01L 21/28194 (2013.01); H01L 29/517 (2013.01); H01L 29/7839 (2013.01); C23C 14/08 (2013.01); C23C 14/24 (2013.01); C30B 23/025 (2013.01); C30B 29/16 (2013.01);
Abstract
A multilayered structure is provided. The multilayered structure may include a silicon substrate and a film of gadolinium oxide disposed on the silicon substrate. The top surface of the silicon substrate may have silicon orientated in the 100 direction (Si(100)) and the gadolinium oxide disposed thereon may have an orientation in the 100 direction (GdO(100)).