The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2015

Filed:

Jul. 02, 2013
Applicants:

Harold Y. Hwang, Cambridge, MA (US);

Mengkun Liu, Boston, MA (US);

Richard D. Averitt, Newton, MA (US);

Keith A. Nelson, Newton, MA (US);

Aaron Sternbach, Larchmont, NY (US);

Kebin Fan, Watertown, MA (US);

Inventors:

Harold Y. Hwang, Cambridge, MA (US);

Mengkun Liu, Boston, MA (US);

Richard D. Averitt, Newton, MA (US);

Keith A. Nelson, Newton, MA (US);

Aaron Sternbach, Larchmont, NY (US);

Kebin Fan, Watertown, MA (US);

Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/02 (2006.01); G01J 5/28 (2006.01); G01J 5/20 (2006.01); H01L 31/09 (2006.01);
U.S. Cl.
CPC ...
G01J 5/28 (2013.01); G01J 5/20 (2013.01); H01L 31/09 (2013.01);
Abstract

An apparatus for detecting electromagnetic radiation within a target frequency range is provided. The apparatus includes a substrate and one or more resonator structures disposed on the substrate. The substrate can be a dielectric or semiconductor material. Each of the one or more resonator structures has at least one dimension that is less than the wavelength of target electromagnetic radiation within the target frequency range, and each of the resonator structures includes at least two conductive structures separated by a spacing. Charge carriers are induced in the substrate near the spacing when the resonator structures are exposed to the target electromagnetic radiation. A measure of the change in conductivity of the substrate due to the induced charge carriers provides an indication of the presence of the target electromagnetic radiation.


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