The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2015
Filed:
Jan. 25, 2011
Applicant:
Yasushi Tsuchiya, Fujimi-machi, JP;
Inventor:
Yasushi Tsuchiya, Fujimi-machi, JP;
Assignee:
Seiko Epson Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/14 (2006.01); G01J 5/08 (2006.01); G01J 5/02 (2006.01); H01L 27/146 (2006.01);
U.S. Cl.
CPC ...
G01J 5/08 (2013.01); G01J 5/02 (2013.01); G01J 5/024 (2013.01); G01J 5/0806 (2013.01); G01J 5/0815 (2013.01); H01L 27/14649 (2013.01);
Abstract
A thermal detector includes a substrate, a thermal detection element and a support member. The substrate has a concave portion, a bottom surface of the concave portion forming a light-reflecting curved surface. The thermal detection element includes a light-absorbing film. The support member supports the thermal detection element with a cavity being provided between the substrate and the support member. The light-reflecting curved surface and the light-absorbing film overlap each other in plan view, the light-reflecting curved surface having a projected area in plan view larger than an area of the light-absorbing film.