The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2015
Filed:
Jun. 08, 2011
Naoto Ito, Tokyo, JP;
Toshio Kitada, Tokyo, JP;
Hidenari Kiguchiya, Tokyo, JP;
Asahi Kasei Kabushiki Kaisha, Osaka, JP;
Abstract
A phenomenon where a depicted pattern becomes unclear owing to a rotational runout of a roller mold in the direction of a rotary shaft is suppressed while restraining an increase in the cost. For the purpose of achieving the above, a roller mold manufacturing device () is provided with an electron beam irradiation device (); a mask () which has an opening that allows passage of some of electron beams, and which forms a plurality of beams that perform simultaneous depiction on a resist; a rotation drive device () which rotates a roller mold () around a rotary shaft (); a displacement amount detection sensor () which detects a rotational runout displacement amount of the roller mold () in the direction of the rotary shaft (); a control device (); and an actuator () which, based on a control signal from the control device (), allows a depiction position by the electron beams to follow the displacement of the roller mold () in the direction of the rotary shaft (), wherein misalignment of an exposed position of the resist, which is caused by rotational runout displacement of the roller mold () in the direction of the rotary shaft (), is suppressed.