The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2015

Filed:

Oct. 05, 2012
Applicant:

Commissariat À L'énergie Atomique ET Aux Énergies Alternatives, Paris, FR;

Inventors:

Xavier Baillin, Crolles, FR;

Jean-Louis Pornin, Crolles, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/16 (2006.01); B81C 1/00 (2006.01); H01L 23/26 (2006.01); H01L 21/50 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00285 (2013.01); H01L 23/26 (2013.01); H01L 21/50 (2013.01); B81C 2201/019 (2013.01); B81C 2203/0118 (2013.01); B81C 2203/0145 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A process for encapsulating a micro-device in a cavity formed between a first and a second substrate is provided, including producing the micro-device in or on the first substrate; attaching and securing the second substrate to the first substrate, thereby forming the cavity in which the micro-device is placed; producing at least one hole through one of the two substrates, leading into the cavity opposite a portion of the other of the two substrates; depositing at least one getter material portion through the hole on said portion of the other of the two substrates; and hermetically sealing the cavity by closing the hole.


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