The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 07, 2015

Filed:

Dec. 10, 2012
Applicant:

Nitto Denko Corporation, Ibaraki-shi, Osaka, JP;

Inventors:

Ryohei Kakiuchi, Ibaraki, JP;

Satoru Yamamoto, Ibaraki, JP;

Kanako Hida, Ibaraki, JP;

Assignee:

Nitto Denko Corporation, Ibaraki-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 51/50 (2006.01); H01L 51/56 (2006.01); H01L 51/00 (2006.01); C23C 14/04 (2006.01); C23C 14/56 (2006.01);
U.S. Cl.
CPC ...
H01L 51/5012 (2013.01); H01L 51/56 (2013.01); H01L 51/001 (2013.01); C23C 14/042 (2013.01); C23C 14/562 (2013.01);
Abstract

Provided are a method and an apparatus for manufacturing an organic EL device which enable deposition of a vaporized material from an evaporation source onto a substrate in a desired pattern, while eliminating the need for a conventional strip-shaped shadow mask. A shielding portionis configured to be switchable between a shield position where the shielding portionis arranged between an evaporation sourceand a substrateso as to shield the substrateand a shield release position where the shielding portionis withdrawn from between the evaporation sourceand the substrateso as to release the shielding of the substrate. The shielding portionis switched between the shield position and the shield release position while rotating together with a roller


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