The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2015
Filed:
Mar. 15, 2012
Applicants:
Yusuke Ohta, Settsu, JP;
Takashi Inada, Settsu, JP;
Makoto Mishiro, Settsu, JP;
Yasushi Nishikawa, Settsu, JP;
Inventors:
Yusuke Ohta, Settsu, JP;
Takashi Inada, Settsu, JP;
Makoto Mishiro, Settsu, JP;
Yasushi Nishikawa, Settsu, JP;
Assignee:
Kaneka Corporation, Osaka-Shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C01B 31/02 (2006.01); C01B 31/04 (2006.01); H01L 23/373 (2006.01); C04B 35/52 (2006.01); C04B 35/524 (2006.01); C04B 35/622 (2006.01);
U.S. Cl.
CPC ...
C01B 31/04 (2013.01); C01B 31/02 (2013.01); H01L 23/373 (2013.01); C04B 35/522 (2013.01); C04B 35/524 (2013.01); C04B 35/62218 (2013.01); H01L 2924/0002 (2013.01);
Abstract
A graphite film with fewer wrinkles and/or undulations is obtained providing two or more stages of heating space and carrying out continuous baking. Especially when a cooling space is provided between each of the heating spaces and another, a graphite film can be obtained which is excellent in flatness and has a high thermal diffusivity.