The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2015
Filed:
Mar. 28, 2012
Applicants:
Arjan Meijer, Reinheim, DE;
Werner Stockum, Reinheim, DE;
Ingo Koehler, Reinheim, DE;
Inventors:
Assignee:
Merck Patent GmbH, Darmstadt, DE;
Primary Examiner:
Int. Cl.
CPC ...
B44C 1/22 (2006.01); C09K 13/02 (2006.01); B81C 1/00 (2006.01); B82Y 10/00 (2011.01); B82Y 40/00 (2011.01); G03F 7/00 (2006.01); G03F 7/20 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
C09K 13/02 (2013.01); B81C 1/00539 (2013.01); B82Y 10/00 (2013.01); B82Y 40/00 (2013.01); G03F 7/0002 (2013.01); G03F 7/2018 (2013.01); H01L 51/0017 (2013.01); H01L 51/0023 (2013.01);
Abstract
The present invention relates to a method for selectively etching and patterning with high resolution of flexible polymer matrices, which may comprise Ag nano tubes.