The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2015
Filed:
Mar. 25, 2009
Applicants:
Junichi Ida, Tokyo, JP;
Hiroto Tokoshima, Tokyo, JP;
Inventors:
Junichi Ida, Tokyo, JP;
Hiroto Tokoshima, Tokyo, JP;
Assignee:
Kurita Water Industries Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C11D 11/00 (2006.01); C11D 7/02 (2006.01); C11D 3/02 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C11D 7/02 (2013.01); C11D 3/02 (2013.01); C11D 11/0047 (2013.01); H01L 21/02052 (2013.01);
Abstract
A method for producing cleaning water for an electronic material, includes obtaining oxygen gas and argon gas from air with a PSA oxygen concentration apparatus, dissolving the oxygen gas and argon gas obtained from the PSA oxygen concentration apparatus in pure water or ultrapure water. A concentration of dissolved oxygen is in a range of 8 to 50 mg/L, and a content of dissolved argon gas is in a range of 2 to 50 volume % of a total amount of dissolved oxygen gas and the dissolved argon gas.