The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2015
Filed:
Mar. 24, 2009
Masato Toshima, Sunnyvale, CA (US);
Linh Can, San Jose, CA (US);
Masato Toshima, Sunnyvale, CA (US);
Linh Can, San Jose, CA (US);
Orbotech LT Solar, LLC., San Jose, CA (US);
Abstract
To provide a processor and a processing method to make the operation to load and unload workpieces to and from a processing chamber more efficient, and improve workpiece processing efficiency. A processor equipped with a processing chamberwherein a first supply/discharge port and a second supply/discharge port have been provided, characterized by being equipped with a first transport mechanism to perform an operation to supply and discharge workpiecesvia the aforementioned first supply/discharge port, a second transport mechanism to perform an operation to supply and discharge workpiecesvia the aforementioned second supply/discharge port, an exchange means to deliver workpiecesthat have been loaded for processing by the aforementioned first transport mechanism to the aforementioned second transport mechanism, and deliver workpiecesthat have been loaded for processing by the aforementioned second transport mechanism to the first transport mechanism, and a control unitto drive the aforementioned first transport mechanism and second transport mechanism, and alternately supply unprocessed workpieces from the aforementioned first supply/discharge port and the aforementioned second supply/discharge port to the aforementioned processing chamber for processing.