The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 07, 2015
Filed:
Sep. 13, 2013
Applicant:
Panasonic Corporation, Osaka, JP;
Inventors:
Takakiyo Harigai, Osaka, JP;
Yoshiaki Tanaka, Nara, JP;
Hideaki Adachi, Osaka, JP;
Eiji Fujii, Osaka, JP;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B41J 2/045 (2006.01); H02N 2/00 (2006.01); H01L 41/187 (2006.01); B41J 2/14 (2006.01); H01L 41/047 (2006.01); H01L 41/08 (2006.01); H01L 41/319 (2013.01); G01C 19/56 (2012.01); H01L 41/113 (2006.01); G01C 19/5769 (2012.01);
U.S. Cl.
CPC ...
H01L 41/1871 (2013.01); H01L 41/187 (2013.01); B41J 2/14233 (2013.01); B41J 2202/03 (2013.01); H01L 41/0477 (2013.01); H01L 41/0478 (2013.01); H01L 41/081 (2013.01); H01L 41/319 (2013.01); B41J 2/14201 (2013.01); G01C 19/56 (2013.01); H01L 41/113 (2013.01); G01C 19/5769 (2013.01);
Abstract
Provided is an NBT-BT lead-free piezoelectric film having a high crystalline orientation and a high piezoelectric constant. The present invention is a piezoelectric film comprising a NaMlayer and a (Bi, Na)TiO—BaTiOlayer. The (Bi, Na) TiO—BaTiOlayer is formed on the NaMlayer, where M represents Pt, Ir, or PtIr and x represents a value of not less than 0.002 and not more than 0.02. Both of the NaMlayer and the (Bi, Na) TiO—BaTiOlayer have a (001) orientation only, a (110) orientation only, or a (111) orientation only.