The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2015
Filed:
Sep. 24, 2010
Applicant:
Martti Blomberg, Espoo, FI;
Inventor:
Martti Blomberg, Espoo, FI;
Assignee:
Teknologian Tutkimuskeskus VTT Oy, VTT, FI;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 26/00 (2006.01); G02F 1/03 (2006.01); G02B 27/00 (2006.01); G01B 9/02 (2006.01); G02B 6/12 (2006.01); G02B 6/26 (2006.01); G02B 6/42 (2006.01); G01J 3/26 (2006.01); G01J 3/02 (2006.01);
U.S. Cl.
CPC ...
G01J 3/26 (2013.01); G01J 3/02 (2013.01); G01J 3/021 (2013.01); G01J 3/0243 (2013.01); G02B 26/001 (2013.01);
Abstract
The invention relates to controllable Fabry-Perot interferometers which are produced with micromechanical (MEMS) technology. Micromechanical interferometers of the prior art have a disadvantage of significantly attenuating infrared radiation. In the inventive solution there is a gap in at least one mirror, serving as a layer of the mirror. The other layers of the mirrors can be made of polycrystalline silicon, which has a negligible attenuation at the infrared range. It is also preferable to provide a hole or a recess in a substrate at the optical area of the interferometer.