The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 31, 2015

Filed:

Aug. 03, 2012
Applicants:

Katsuyuki Kurachi, Tokyo, JP;

Yasuhiro Aida, Tokyo, JP;

Hitoshi Sakuma, Tokyo, JP;

Kazuhiko Maejima, Tokyo, JP;

Inventors:

Katsuyuki Kurachi, Tokyo, JP;

Yasuhiro Aida, Tokyo, JP;

Hitoshi Sakuma, Tokyo, JP;

Kazuhiko Maejima, Tokyo, JP;

Assignee:

TDK Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/047 (2006.01);
U.S. Cl.
CPC ...
H01L 41/0478 (2013.01); H01L 41/0477 (2013.01);
Abstract

A piezoelectric device according to the present invention is provided with a first electrode film, a first nonmetal electroconductive intermediate film provided on the first electrode film, a piezoelectric film provided on the first nonmetal electroconductive intermediate film, a second nonmetal electroconductive intermediate film provided on the piezoelectric film, and a second electrode film provided on the second nonmetal electroconductive intermediate film. A linear expansion coefficient of the first nonmetal electroconductive intermediate film is larger than those of the first electrode film and the piezoelectric film, and a linear expansion coefficient of the second nonmetal electroconductive intermediate film is larger than those of the second electrode film and the piezoelectric film.


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