The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 31, 2015
Filed:
Mar. 15, 2013
Applicant:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Inventor:
Kenji Kojima, Yokohama, JP;
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01); H01L 49/02 (2006.01);
U.S. Cl.
CPC ...
H01L 28/20 (2013.01); H01L 22/14 (2013.01); H01L 22/20 (2013.01); H01L 22/34 (2013.01);
Abstract
According to one embodiment, a method for manufacturing a semiconductor device is disclosed. The method includes heating a resistor pattern by scanning the resistor pattern with a first beam. The resistor pattern includes resistors, and a connection structure connecting the resistors in series. The resistors is arranged in matrix of two or more rows and two or more columns. The method includes further heating the resistor pattern by scanning the resistor pattern with a second beam having a different scan direction as that of the first beam.