The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8987816 B1

PDF
Full Text
Expired
Date of Patent:
Mar. 24, 2015

Filed:

Oct. 21, 2014
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Jason Stephens, Cohoes, NY (US);

Marc Tarabbia, Pleasant Valley, NY (US);

Nader Hindawy, Wappingers Falls, NY (US);

Roderick Augur, Hopewell Junction, NY (US);

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 23/48 (2006.01); H01L 27/088 (2006.01); H01L 29/49 (2006.01); G06F 17/50 (2006.01);
U.S. Cl.
CPC ...
H01L 23/481 (2013.01); H01L 27/088 (2013.01); H01L 29/4916 (2013.01); G06F 17/5077 (2013.01);
Abstract

A method for forming CA power rails using a three mask decomposition process and the resulting device are provided. Embodiments include forming a horizontal diffusion CA power rail in an active layer of a semiconductor substrate using a first color mask; forming a plurality of vertical CAs in the active layer using second and third color masks, the vertical CAs connecting the CA power rail to at least one diffusion region on the semiconductor substrate, spaced from the CA power rail, wherein each pair of CAs formed by one of the second and third color masks are separated by at least two pitches.


Find Patent Forward Citations

Stephens, Jason. (2015). Contact power rail (U.S. Patent No. 8987816). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8987816

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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