The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2015
Filed:
Jul. 09, 2013
Applicant:
Msp Corporation, Shoreview, MN (US);
Inventors:
Benjamin Y. H. Liu, North Oaks, MN (US);
Thuc M. Dinh, Shakopee, MN (US);
Yamin Ma, Roseville, MN (US);
Assignee:
MSP Corporation, Shoreview, MN (US);
Primary Examiner:
Int. Cl.
CPC ...
B05B 17/04 (2006.01); B05B 1/08 (2006.01); B01F 3/04 (2006.01); C23C 16/448 (2006.01);
U.S. Cl.
CPC ...
B05B 17/04 (2013.01); C23C 16/4486 (2013.01);
Abstract
A method for forming a droplet aerosol for vaporization and subsequent thin film deposition on a substrate. The method includes drawing a gas from a compressed gas source and drawing a liquid from a liquid source. The liquid and gas are conjoined in either a coaxial flow relationship or a radial flow relationship or an angular relationship between radial and coaxial flow wherein the gas engages the liquid to form droplets suitable for vaporization and subsequent thin film deposition on a substrate.