The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 24, 2015

Filed:

Apr. 15, 2011
Applicants:

Vladimir Bulovic, Lexington, MA (US);

Marc A. Baldo, Cambridge, MA (US);

Martin A. Schmidt, Reading, MA (US);

Valerie Gassend, San Carlos, CA (US);

Jianglong Chen, San Jose, CA (US);

Inventors:

Vladimir Bulovic, Lexington, MA (US);

Marc A. Baldo, Cambridge, MA (US);

Martin A. Schmidt, Reading, MA (US);

Valerie Gassend, San Carlos, CA (US);

Jianglong Chen, San Jose, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 3/04 (2006.01); B05D 1/12 (2006.01); H01L 51/00 (2006.01); H01L 51/56 (2006.01);
U.S. Cl.
CPC ...
H01L 51/0011 (2013.01); B05D 1/12 (2013.01); H01L 51/56 (2013.01);
Abstract

The disclosure relates to a method for depositing an organic film layer on a substrate. In one implementation a method to deposit organic film by generating vaporized organic particles; streaming a carrier fluid proximal to a source to carry the vaporized organic particles and solid organic particles from the source towards the substrate; transporting the vaporized and solid organic particles through a discharge nozzle with a plurality of micro-pore openings, placed between the source and the substrate, that permits the passage of at least a portion of the vaporized or solid organic particles through the micro-pores; depositing the vaporized organic particles and the solid organic particles that are transported through the discharge nozzle onto the substrate.


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