The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2015
Filed:
Jul. 17, 2012
James P. Fazio, San Mateo, CA (US);
James P. Fazio, San Mateo, CA (US);
Nordson Corporation, Westlake, OH (US);
Abstract
Apparatus and methods for handling workpieces in a processing system. The workpiece vertical lift mechanism (), which is disposed inside a process chamber () of the processing system, is adapted to transfer a workpiece () to and from a pedestal portion () of an electrode (). The pedestal portion () is configured to support the workpiece () during processing. The workpiece vertical lift mechanism () including a workpiece fixture () movable relative to the pedestal portion () between a first position in which the workpiece fixture () holds the workpiece () in a non-contacting relationship with the pedestal portion () and a second position in which the pedestal portion () projects above workpiece fixture () so as to transfer the workpiece () from the workpiece fixture () to the pedestal portion ().