The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2015
Filed:
Jun. 27, 2011
Applicant:
Sunil Wickramanayaka, Tokyo, JP;
Inventor:
Sunil Wickramanayaka, Tokyo, JP;
Assignee:
Canon Anelva Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); H01L 21/687 (2006.01); H01J 37/34 (2006.01); C23C 14/50 (2006.01); C23C 14/04 (2006.01); C23C 14/22 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H01L 21/68735 (2013.01); H01J 37/3417 (2013.01); C23C 14/505 (2013.01); C23C 14/04 (2013.01); C23C 14/225 (2013.01); C23C 14/50 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01);
Abstract
A wafer holder including a wafer stage and a wafer stage outer-ring surrounding the wafer stage wherein the wafer stage has a diameter smaller than the diameter of a wafer loaded on the wafer stage, the wafer stage outer-ring has an inner diameter at the upper side of the outer-ring which is larger than the diameter of the wafer loaded on the wafer stage, and the upper surface of the outer-ring lies above the upper surface of the wafer loaded on the wafer stage.