The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2015
Filed:
May. 13, 2010
Tino Harig, Langelsheim, DE;
Markus Höfer, Gardessen, DE;
Artur Laukart, Braunschweig, DE;
Lothar Schäfer, Meine, DE;
Markus Armgardt, Braunschweig, DE;
Tino Harig, Langelsheim, DE;
Markus Höfer, Gardessen, DE;
Artur Laukart, Braunschweig, DE;
Lothar Schäfer, Meine, DE;
Markus Armgardt, Braunschweig, DE;
Abstract
A coating installation containing at least one recipient which can be evacuated and which is adapted to accommodate a substrate, at least one gas supply device which is used to introduce at least one gaseous precursor into the recipient and at least one heatable activation element which has a definable longitudinal extension and which is fastened by means of at least one associated mechanical fastening device to be virtually immobile relative to the recipient. In a corresponding method, an electric current can be supplied to the activation element via at least two contact elements and at least one of the contact elements is designed to contact the activation element in alternating contact points.