The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2015
Filed:
Aug. 20, 2014
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Tomohiro Sakai, Matsumoto, JP;
Tatsushi Kato, Chino, JP;
Assignee:
Seiko Epson Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/045 (2006.01); H01L 41/187 (2006.01); H01L 41/047 (2006.01); B41J 2/14 (2006.01);
U.S. Cl.
CPC ...
H01L 41/1873 (2013.01); H01L 41/0472 (2013.01); H01L 41/1878 (2013.01); B41J 2/14201 (2013.01);
Abstract
Provided is a piezoelectric element that has a first electrode, a piezoelectric layer provided on the first electrode, and a second electrode provided on the piezoelectric layer, an average grain size of crystal grains aligned in a planar direction within 15° from a (100) plane is less than the average grain size of the crystal grains facing a planar direction inclined by more than 15° from the (100) plane, in a case in which the crystal orientation of the piezoelectric layer is analyzed using an electron beam backscatter diffraction method (EBSD).