The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2015
Filed:
Sep. 29, 2008
Masato Kinouchi, Yokohama, JP;
Takayuki Goto, Yokohama, JP;
Satoshi Tawara, Yokohama, JP;
Takeshi Tsuno, Yokohama, JP;
Jun Utsumi, Yokohama, JP;
Kensuke Ide, Ritto, JP;
Takenori Suzuki, Ritto, JP;
Masato Kinouchi, Yokohama, JP;
Takayuki Goto, Yokohama, JP;
Satoshi Tawara, Yokohama, JP;
Takeshi Tsuno, Yokohama, JP;
Jun Utsumi, Yokohama, JP;
Kensuke Ide, Ritto, JP;
Takenori Suzuki, Ritto, JP;
Mitsubishi Heavy Industries, Ltd., Tokyo, JP;
Abstract
A room temperature bonding machine is provided with an evacuation apparatus, a gas supply apparatus, a pressure gauge, a cleaner apparatus, a pressure controller and a pressing mechanism. The evacuation apparatus evacuates gas from the chamber. The gas supply apparatus supplies introduction gas into the chamber. The pressure gauge measures the pressure in the chamber. The cleaner apparatus cleans first and second substrates in the chamber when said pressure is at a predetermined degree of vacuum. The pressure controller controls both of the evacuation apparatus and the gas supply apparatus so that the pressure is regulated to a target pressure. The pressing mechanism presses and bonds the first and second substrates when the pressure is set to said target pressure.