The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 24, 2015

Filed:

Mar. 10, 2010
Applicants:

Kaoru Naoi, Yokohama, JP;

Yoichi Ishizaki, Sodegaura, JP;

Tatsuhito Inouchi, Ichihara, JP;

Koichi Sekiguchi, Kimitsu, JP;

Inventors:

Kaoru Naoi, Yokohama, JP;

Yoichi Ishizaki, Sodegaura, JP;

Tatsuhito Inouchi, Ichihara, JP;

Koichi Sekiguchi, Kimitsu, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 21/08 (2006.01); F16C 29/02 (2006.01);
U.S. Cl.
CPC ...
F16C 29/025 (2013.01); G01B 21/08 (2013.01);
Abstract

In a parallel slider device with a pneumatic linear guide, the stiffness of the mechanical coupling and the air bearing stiffness are prevented from interfering each other such that the parallelism between the two sliders can be maintained at a high precision in a highly reproducible manner. A difference in the slider support stiffness (air bearing stiffness) between a first pneumatic linear guide and a second pneumatic linear guide by varying the sizes of the air gaps and the supply air pressures so that any error in the linearity is accommodated by the changes in the air gap on the side of the linear guide having a lower slider support stiffness in a stable manner.


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