The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 24, 2015
Filed:
Mar. 15, 2013
Applicant:
Frederick Flitsch, New Windsor, NY (US);
Inventor:
Frederick Flitsch, New Windsor, NY (US);
Assignee:
Futrfab, Inc., New Windsor, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/306 (2006.01); B23P 19/04 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01);
U.S. Cl.
CPC ...
B23P 19/04 (2013.01); H01L 21/67017 (2013.01); H01L 21/6719 (2013.01); H01L 21/67346 (2013.01); H01L 21/67748 (2013.01); H01L 21/67769 (2013.01); H01L 21/67775 (2013.01);
Abstract
The present invention provides various aspects of support for a fabrication facility capable of routine placement and replacement of processing tools. Support aspects include support structure for processing tools, a clean environment carrier for a single substrate and a quick disconnect flange which facilities connecting and disconnect of electrical, liquid and gas utilities to a processing tool placed in the fabricator. Methods of installing processing tools and for producing substrates in this environment are provided.