The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 24, 2015

Filed:

Apr. 27, 2012
Applicants:

Yi Zheng, San Ramon, CA (US);

Guomin Mao, San Jose, CA (US);

Hicham M. Sougrati, Elk Grove, CA (US);

Xiaozhong Dang, Fremont, CA (US);

Inventors:

Yi Zheng, San Ramon, CA (US);

Guomin Mao, San Jose, CA (US);

Hicham M. Sougrati, Elk Grove, CA (US);

Xiaozhong Dang, Fremont, CA (US);

Assignee:

HGST Netherlands B.V., Amsterdam, NL;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G11B 5/127 (2006.01); H04R 31/00 (2006.01); G11B 5/31 (2006.01); G11B 5/39 (2006.01);
U.S. Cl.
CPC ...
G11B 5/3163 (2013.01); G11B 5/398 (2013.01);
Abstract

A method for manufacturing a magnetic read sensor allows for the construction of a very narrow trackwidth sensor while avoiding problems related to mask liftoff and shadowing related process variations across a wafer. The process involves depositing a plurality of sensor layers and forming a first mask structure. The first mask structure has a relatively large opening that encompasses a sensor area and an area adjacent to the sensor area where a hard bias structure can be deposited. A second mask structure is formed over the first mask structure and includes a first portion that is configured to define a sensor dimension and a second portion that is over the first mask structure in the field area.


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Quick Actions:

Zheng, Yi. (2015). Differentiated liftoff process for ultra-shallow mask defined narrow trackwidth magnetic sensor (U.S. Patent No. 8984741). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8984741

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