The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2015
Filed:
May. 20, 2010
Fan-tien Cheng, Tainan, TW;
Chi-an Kao, Tainan, TW;
Hsien-cheng Huang, Taoyuan County, TW;
Yung-cheng Chang, Tainan County, TW;
Fan-Tien Cheng, Tainan, TW;
Chi-An Kao, Tainan, TW;
Hsien-Cheng Huang, Taoyuan County, TW;
Yung-Cheng Chang, Tainan County, TW;
National Cheng Kung University, Tainan, TW;
Abstract
A manufacturing execution system (MES) with virtual-metrology capabilities and a manufacturing system including the MES are provided. The MES is built on a middleware architecture (such as an object request broker architecture), and includes an equipment manager, a virtual metrology system (VMS), a statistical process control (SPC) system, an alarm manager and a scheduler. The manufacturing system includes a first process tool, a second process tool, a metrology tool, the aforementioned MES, a first R2R (Run-to-Run) controller and a second R2R controller.