The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2015
Filed:
Mar. 01, 2013
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Ryota Sekiguchi, Kawasaki, JP;
Oichi Kubota, Kawasaki, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/41 (2006.01); G01N 21/45 (2006.01); G01N 21/3586 (2014.01); G01N 21/3563 (2014.01);
U.S. Cl.
CPC ...
G01N 21/41 (2013.01); G01N 21/45 (2013.01); G01N 21/3586 (2013.01); G01N 21/3563 (2013.01);
Abstract
A method of calculating, using a computer, a refractive index of at least a portion of a specimen by using electromagnetic wave measurement. The method includes measuring a first scattered waveform from a structure of the specimen, measuring a second scattered waveform from a structure, in which a material for calculating a refractive index is disposed on a surface of the specimen, and comparing intensities of peak positions at corresponding portions of the first scattered waveform and the second scattered waveform.