The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2015
Filed:
Dec. 19, 2008
Applicants:
Andrzej Klimczak, Warsaw, PL;
Rafal Bugyi, Warsaw, PL;
Pawel Ozimek, Warsaw, PL;
Inventors:
Assignee:
TRUMPF Huettinger Sp. zo. o., Zielonka, PL;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05F 1/59 (2006.01); H02H 9/02 (2006.01); H01J 37/34 (2006.01); G05F 1/595 (2006.01); G05F 1/613 (2006.01);
U.S. Cl.
CPC ...
H02H 9/021 (2013.01); H01J 37/3444 (2013.01); H01J 37/3467 (2013.01);
Abstract
The current (I) flowing between a plasma chamber and a power supply is limited by limiting the current change di/dt if the current exceeds a predetermined current. A current change limiting device is provided in the current path between the power supply and the plasma chamber and is configured to determine if the current exceeds the predetermined current and limits the current change.
Klimczak, Andrzej. (2015). Current limiting device for plasma power supply (U.S. Patent No. 8981664). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8981664
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile