The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2015
Filed:
Dec. 14, 2012
Applicant:
Canon Kabushiki Kaisha, Tokyo, JP;
Inventors:
Kaoru Miura, Matsudo, JP;
Makoto Kubota, Yokohama, JP;
Jumpei Hayashi, Chofu, JP;
Takayuki Watanabe, Yokohama, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); H01L 41/18 (2006.01); B08B 7/02 (2006.01); B41J 2/14 (2006.01); H02N 2/10 (2006.01); H02N 2/16 (2006.01);
U.S. Cl.
CPC ...
H01L 41/187 (2013.01); H01L 41/18 (2013.01); B08B 7/028 (2013.01); B41J 2/14233 (2013.01); H02N 2/106 (2013.01); H02N 2/163 (2013.01); B41J 2202/03 (2013.01);
Abstract
A piezoelectric material contains a perovskite oxynitride expressed by the General Formula: (BaSr)(Ti(NbTa))(ON). In the formula, x, y, z and w are numerical values satisfying the relationships: 0≦x≦1, 0≦y≦1, 0<z<<⅓, and 0<w≦z. Also, z can be 0.1≦z≦0.2. The piezoelectric material may be in the form of a film having a thickness in the range of 200 nm to 10 μm that is disposed on a substrate. The perovskite oxynitride may have a tetragonal crystal structure.