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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 8981544 B1

PDFFull Text
Date of Patent:
Mar. 17, 2015

Filed:

Oct. 31, 2011

Packaging structure of a micro-device including a getter material

Applicants:

Xavier Baillin, Crolles, FR;

Christine Ferrandon, Sassenage, FR;

Inventors:

Xavier Baillin, Crolles, FR;

Christine Ferrandon, Sassenage, FR;

Assignee:

Commissariat a l'energie atomique et aux energies alternatives, Paris, FR;

Attorney:

Oblon, McClelland, Maier & Neustadt, L.L.P.

Primary Examiner:

David Zarneke

Int. Cl.
CPC ...
H01L 23/20 (2006.01); H01L 21/322 (2006.01); H01L 23/26 (2006.01); H01L 23/31 (2006.01); B81B 7/00 (2006.01);
U.S. Cl.
CPC ...
H01L 23/26 (2013.01); H01L 23/315 (2013.01); B81B 7/0038 (2013.01); H01L 2924/0002 (2013.01);
Abstract

A packaging structure including at least one cavity wherein at least one micro-device is provided, the cavity being bounded by at least a first substrate and at least a second substrate integral with the first substrate through at least one bonding interface consisting of at least one metal or dielectric material, wherein at least one main face of the second substrate provided facing the first substrate is covered with at least one layer of at least one getter material, the bonding interface being provided between the first substrate and the layer of getter material.

Find Patent Forward Citations

Baillin, Xavier. (2015). Packaging structure of a micro-device including a getter material (U.S. Patent No. 8981544). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8981544

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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