The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2015
Filed:
Mar. 06, 2014
Samsung Display Co., Ltd., Yongin, Gyeonggi-Do, KR;
Dong-Hyun Gong, Yongin, KR;
Young-Gil Park, Yongin, KR;
Jae-Kwon Lee, Yongin, KR;
Jung-Un Kim, Yongin, KR;
Do-Soon Jung, Suwon-si, KR;
Hyun-Jung Kim, Yongin-si, KR;
Geum-Tae Kim, Osan-si, KR;
Samsung Display Co., Ltd., , KR;
Abstract
An inspection system includes: an automated optical inspection device detecting a defect of an inspection object by using a light; a scanning electron microscope device for inspecting the defect of the inspection object by using an electron beam and including a vacuum chamber; a stage positioned below and spaced from the scanning electron microscope device and supporting the inspection object; and a transferring device connected to the scanning electron microscope chamber and the automated optical inspection and transferring the scanning electron microscope device and the automated optical inspection device to positions over the stage. Air is in a gap between the chamber and the inspection object. Accordingly, an inspection object of a large size may be inspected for analysis without damage to the inspection object.