The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2015
Filed:
Nov. 10, 2009
Applicants:
Greja Johanna Adriana Verheijden, Riethoven, NL;
Gerhard Koops, Aalst, BE;
Inventors:
Greja Johanna Adriana Verheijden, Riethoven, NL;
Gerhard Koops, Aalst, BE;
Assignee:
NXP, B.V., Eindhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00333 (2013.01); B81C 2203/0136 (2013.01); B81C 2203/0145 (2013.01);
Abstract
A method of manufacturing a MEMS device comprises forming a MEMS device element. A sacrificial layeris provided over the device element and a package cover layeris provided over the sacrificial layer. A spacer layeris formed over the sacrificial layer and is etched to define spacer portions adjacent an outer side wall of the sacrificial layer. These improve the hermetic sealing of the side walls of the cover layer