The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2015
Filed:
Nov. 13, 2013
Applicant:
Daniel R. Shepard, North Hampton, NH (US);
Inventor:
Daniel R. Shepard, North Hampton, NH (US);
Assignee:
Contour Semiconductor, Inc., North Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/26 (2006.01); H01L 21/311 (2006.01); H01L 45/00 (2006.01); H01L 27/24 (2006.01); H01L 21/033 (2006.01); H01L 27/102 (2006.01);
U.S. Cl.
CPC ...
H01L 21/311 (2013.01); H01L 27/1021 (2013.01); H01L 45/06 (2013.01); H01L 45/1233 (2013.01); H01L 45/144 (2013.01); H01L 45/1683 (2013.01); H01L 27/2409 (2013.01); H01L 21/0337 (2013.01); H01L 21/31144 (2013.01);
Abstract
In various embodiments, a method for forming a memory array includes forming a plurality of rows and columns of hardmask material, etching holes in the one or more layers of insulating material using the combined masking properties of the rows of hardmask material and the columns of hardmask material, and forming memory cells in the holes. The corners of the holes can be rounded.