The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 17, 2015

Filed:

Jan. 30, 2009
Applicants:

Masami Nakagame, Odawara, JP;

Hiroyuki Nishida, Odawara, JP;

Norihiro Kadota, Odawara, JP;

Jun Fujinawa, Odawara, JP;

Daisuke Onodera, Odawara, JP;

Inventors:

Masami Nakagame, Odawara, JP;

Hiroyuki Nishida, Odawara, JP;

Norihiro Kadota, Odawara, JP;

Jun Fujinawa, Odawara, JP;

Daisuke Onodera, Odawara, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 3/00 (2006.01); C23C 16/54 (2006.01); B05D 1/28 (2006.01); B05D 7/04 (2006.01); C23C 14/56 (2006.01); B05D 3/06 (2006.01); B05D 7/00 (2006.01);
U.S. Cl.
CPC ...
C23C 16/545 (2013.01); B05D 1/28 (2013.01); B05D 7/04 (2013.01); C23C 14/562 (2013.01); B05D 3/067 (2013.01); B05D 7/54 (2013.01); B05D 2252/02 (2013.01);
Abstract

A functional film having a particular organic film and a particular inorganic film is produced. The functional film is consistently produced and exhibits the intended performance. The functional film production method includes forming an organic film on a surface of a substrate, handling the substrate having the organic film formed thereon so that no member comes in contact with an organic film surface in vacuum until formation of an inorganic film, and forming the inorganic film by vacuum deposition on the organic film surface.


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