The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2015
Filed:
Apr. 11, 2012
Applicant:
Yoshinori Ikagawa, Ibara, JP;
Inventor:
Yoshinori Ikagawa, Ibara, JP;
Assignee:
Tazmo Co., Ltd., Okayama, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C03C 15/00 (2006.01); B05C 5/02 (2006.01); B05C 9/12 (2006.01); B05C 11/06 (2006.01);
U.S. Cl.
CPC ...
B05C 5/02 (2013.01); B05C 5/0208 (2013.01); B05C 5/022 (2013.01); B05C 9/12 (2013.01); B05C 11/06 (2013.01);
Abstract
A film in a dry state is efficiently dissolved and removed. A film removing method includes steps of moving a nozzle head (B) close to a soluble film () formed on a substrate (), forming a liquid pool () of chemical liquid () between the nozzle head (B) and the film () by continuously and simultaneously discharging and sucking the chemical liquid () from the nozzle head (B), and horizontally moving the substrate () in a state in which the nozzle head (B) and the surface of the film () are not contacted so as to relatively move the liquid pool () of the chemical liquid on the substrate ().