The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2015
Filed:
Aug. 27, 2010
Applicants:
Guido Mahnke, Mainaschaff, DE;
Bernhard Stock, Alzenau, DE;
Markus Hanika, Landsberg, DE;
Ferdinand Füller, Hanau, DE;
Inventors:
Guido Mahnke, Mainaschaff, DE;
Bernhard Stock, Alzenau, DE;
Markus Hanika, Landsberg, DE;
Ferdinand Füller, Hanau, DE;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01); C25B 11/00 (2006.01); C25B 13/00 (2006.01); H01J 37/34 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01J 37/3405 (2013.01); H01J 37/32935 (2013.01); H01J 37/342 (2013.01); H01J 37/3438 (2013.01); H01J 37/3444 (2013.01);
Abstract
Apparatuses for deposition of one or more layers. In one aspect, an apparatus for deposition of one or more layers includes an anode; a cathode; a vacuum chamber including the anode and the cathode; a sensor configured to detect an electric potential between a section of the at least one anode and a section of the chamber. Furthermore, methods to monitor a device for deposition of one or more layers are also described.