The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2015
Filed:
Jan. 20, 2010
Applicants:
Paul A. Hoisington, Hanover, NH (US);
Marc A. Torrey, Windsor, VT (US);
Inventors:
Paul A. Hoisington, Hanover, NH (US);
Marc A. Torrey, Windsor, VT (US);
Assignee:
FUJIFILM Dimatix, Inc., Lebanon, NH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B41J 2/14 (2006.01); H01L 21/62 (2006.01); B41J 2/45 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00904 (2013.01); B81C 1/00119 (2013.01); B81B 2201/058 (2013.01); B81C 2201/0143 (2013.01); B81C 2201/019 (2013.01);
Abstract
A MEMS device is described that has a body with a component bonded to the body. The body has a main surface and a side surface adjacent to the main surface and smaller than the main surface. The body is formed of a material and the side surface is formed of the material and the body is in a crystalline structure different from the side surface. The body includes an outlet in the side surface and the component includes an aperture in fluid connection with the outlet.