The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2015
Filed:
Mar. 31, 2012
Applicants:
Masaki Takaoka, Kyoto, JP;
Daisuke Kaminishi, Kyoto, JP;
Mizuho Okada, Kyoto, JP;
Nobuhisa Yamashita, Kyoto, JP;
Inventors:
Masaki Takaoka, Kyoto, JP;
Daisuke Kaminishi, Kyoto, JP;
Mizuho Okada, Kyoto, JP;
Nobuhisa Yamashita, Kyoto, JP;
Assignee:
Rohm Co., Ltd., Kyoto, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/56 (2012.01); G01C 19/5769 (2012.01); H01L 41/08 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
G01C 19/5769 (2013.01); H01L 41/0815 (2013.01); H01L 41/1132 (2013.01);
Abstract
A piezoelectric thin film structure includes a substrate, a silicon oxide film disposed on the substrate, a first aluminum oxide film disposed on the silicon oxide film, a lower electrode layer disposed on the first aluminum oxide film, a piezoelectric film layer disposed on the lower electrode layer, and an upper electrode layer disposed on the piezoelectric film layer.