The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 17, 2015

Filed:

Mar. 31, 2012
Applicants:

Masaki Takaoka, Kyoto, JP;

Daisuke Kaminishi, Kyoto, JP;

Mizuho Okada, Kyoto, JP;

Nobuhisa Yamashita, Kyoto, JP;

Inventors:

Masaki Takaoka, Kyoto, JP;

Daisuke Kaminishi, Kyoto, JP;

Mizuho Okada, Kyoto, JP;

Nobuhisa Yamashita, Kyoto, JP;

Assignee:

Rohm Co., Ltd., Kyoto, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/56 (2012.01); G01C 19/5769 (2012.01); H01L 41/08 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
G01C 19/5769 (2013.01); H01L 41/0815 (2013.01); H01L 41/1132 (2013.01);
Abstract

A piezoelectric thin film structure includes a substrate, a silicon oxide film disposed on the substrate, a first aluminum oxide film disposed on the silicon oxide film, a lower electrode layer disposed on the first aluminum oxide film, a piezoelectric film layer disposed on the lower electrode layer, and an upper electrode layer disposed on the piezoelectric film layer.


Find Patent Forward Citations

Takaoka, Masaki. (2015). Piezoelectric thin film structure and angular velocity detection apparatus (U.S. Patent No. 8978469). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/8978469

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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