The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 17, 2015
Filed:
Mar. 26, 2012
Takeshi Sugiyama, Chiba, JP;
Takeshi Sugiyama, Chiba, JP;
Seiko Instruments Inc., Chiba, JP;
Abstract
A package manufacturing method where a base substrate and a lid substrate, at least one having a through-hole, are anodically bonded to each other using a jig having a communication-hole and arranged in a vacuum chamber to laminate the lid substrate to the base substrate and thereby form a bonded body having a plurality of cavities, each of which includes an electronic part sealed therein. The through-hole and the communication-hole are aligned with each other inside the vacuum chamber, such that gas within the cavities can escape through the through-hole and the communication-hole during bonding. A plurality of packages are formed by cutting the bonded body for every one of the plurality of cavities.