The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 10, 2015

Filed:

May. 20, 2014
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

James N. Hall, Parker, TX (US);

Lance W. Barron, Plano, TX (US);

Cuiling Gong, Dallas, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/70 (2006.01); H01L 27/118 (2006.01); G11C 23/00 (2006.01); H01L 21/77 (2006.01);
U.S. Cl.
CPC ...
H01L 27/118 (2013.01); G11C 23/00 (2013.01); H01L 21/77 (2013.01); H01L 27/11803 (2013.01);
Abstract

A MEMS logic device comprising agate which pivots on a torsion hinge, two conductive channels on the gate, one on each side of the torsion hinge, source and drain landing pads under the channels, and two body bias elements under the gate, one on each side of the torsion hinge, so that applying a threshold bias between one body bias element and the gate will pivot the gate so that one channel connects the respective source and drain landing pad, and vice versa. An integrated circuit with MEMS logic devices on the dielectric layer, with the source and drain landing pads connected to metal interconnects of the integrated circuit. A process of forming the MEM switch.


Find Patent Forward Citations

Loading…