The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 10, 2015
Filed:
Sep. 04, 2012
Keisuke Kikutani, Yokkaichi, JP;
Satoshi Nagashima, Yokkaichi, JP;
Hidefumi Mukai, Mie-gun, JP;
Takehiro Kondoh, Yokkaichi, JP;
Hisataka Meguro, Yokkaichi, JP;
Keisuke Kikutani, Yokkaichi, JP;
Satoshi Nagashima, Yokkaichi, JP;
Hidefumi Mukai, Mie-gun, JP;
Takehiro Kondoh, Yokkaichi, JP;
Hisataka Meguro, Yokkaichi, JP;
Kabushiki Kaisha Toshiba, Tokyo, JP;
Abstract
According to one embodiment, a method of manufacturing a device, includes forming a first core including a line portion extending between first and second regions and having a first width and a fringe having a dimension larger than the first width, forming a mask on the fringe and on a first sidewall on the first core, removing the first core so that a remaining portion having a dimension larger than the first width is formed below the mask, forming a second sidewall on a pattern corresponding the first sidewall and the remaining portion, the second sidewall having a second width less than the first width and facing a first interval less than the first width in the first region and facing a second interval larger than the first interval in the second region.