The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 10, 2015

Filed:

Mar. 22, 2011
Applicants:

Takamichi Fujii, Kanagawa-ken, JP;

Akihiro Mukaiyama, Kanagawa-ken, JP;

Inventors:

Takamichi Fujii, Kanagawa-ken, JP;

Akihiro Mukaiyama, Kanagawa-ken, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B29C 65/00 (2006.01); H01L 21/00 (2006.01); B32B 7/02 (2006.01); B81C 3/00 (2006.01);
U.S. Cl.
CPC ...
B32B 7/02 (2013.01); B81C 3/004 (2013.01); B32B 2457/14 (2013.01); B81B 2201/13 (2013.01); B81B 2203/0338 (2013.01); B81B 2207/07 (2013.01);
Abstract

A method of manufacturing a micro structure, includes the steps of: preparing separate first and second substrates, the first substrate having a first surface on which a first structural body having a first height and a second structural body having a second height greater than the first height of the first structural body are arranged, the second substrate having a second surface; then placing the first and second substrates to cause the first and second surfaces to face each other across the first and second structural bodies; and then bonding the first and second substrates to each other while compressing the second structural body in a height direction thereof between the first and second surfaces to cause the second structural body to have a height defined by the first structural body.


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